home Z 590 Z 550 Z 550 Z 590 upgraded Z 590 upgraded

A 550 VZK refurbished Z 400 upgraded Z 550 upgraded Z 550 upgraded Target

Finished projects

Leybold Z 590 ( Sputter-center for production )

Features

During renovation work at customer site Kuhnke-PLC 653-W was replaced by a Simatic PLC S7-300. Visualization and process data management is done via a PC with a 19 "TFT- monitor. Relevant process data are recorded in an Excel file (Data logging). Furthermore, the complete vacuum measurement was re-equipped with gauges from Pfeiffer company. Built into the system water distribution was for better accessibility outsourced and located on a wall behind the plant. The pneumatic valve island has also been revamped.

Sputter-down system, 4 cathodes PK 200 ( dia. 200mm ).

Semi-automatic, single-substrate load-lock.

Substrate carrier with 4 substrate positions. Deposition mode static, dynamic or with oscillation.

Sputter mode RF/DC, with or without RF-Bias.

RF-etching.

Presputter-shutter available in different models.

Microprocessor-controlled. 40 Recipies can be stored from 69 programmable layer-types.

19"-TFT for visualization.

Pumping system: D40B and TMP 1000, loadlock D8B.

Pictures Leybold Z590 - water distribution

home Z 590 Z 550 Z 550 Z 590 upgraded Z 590 upgraded

A 550 VZK refurbished Z 400 upgraded Z 550 upgraded Z 550 upgraded Target

back