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Leybold-Heraeus A 550 VZK - retrofitted, upgrated

A 550 VZK ( Cathode-sputtering system used for production )

Retrofit of an old semi-automatic system. The old control unit was not possible to service anymore, electrical diagrams not available. Therefore the electrical cabinet was completely replaced. The complete system was cleaned and fully refurbished.

Features

Sputter-down system, 3 cathode positions PK 200 (200mm dia.)

New electrical cabinet

New RF-power-supply

Sputter mode RF, with or without RF-Bias.

RF-etching.

New pneumatic system, new valves, new vacuum measuring systems and gas-inlet system

PLC control - Simatic S7-300

PicturesLeybold-Heraeus A 550 VZK

System control unit, process chamber, gas inlet system

Pneumatic unit, vacuum valves, vacuum measurement

electrical cabinet inside

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