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Leybold-Heraeus Z 400 - retrofitted, upgraded

Z 400 ( Cathode-sputtering system used for research )

Reprocessing of a sputtering machine. The facility was completely gutted. Rotary feedthrough and valves have been serviced. Critical components were replaced with new components.

Features

Sputter-down system, 3 cathode positions PK 75 (75mm dia.)

New electrical cabinet

New DC-power-supply

Sputter mode DC.

New pneumatic system, new valves, new vacuum measuring systems and gas-inlet system

PLC control - Simatic S7-300

Pictures Leybold-Heraeus Z 400

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