home Z 590 Z 550 Z 550 Z 590 upgraded Z 590 upgraded

Z 590 upgraded A 550 VZK upgraded Z 400 upgraded Z 550 upgraded Target

Leybold-Heraeus Z 550 - retrofitted, upgrated

Z 550 ( Cathode-sputtering system used for production )

Features

Sputter-down system, 3 cathode positions PK 150 (152mm dia.)

New DC-power-supply

New RF-power-supply and Variomatch

Sputter mode DC, with or without RF-Bias.

RF-etching.

New pneumatic system, new valves, new vacuum measuring systems and gas-inlet system

PLC control - Simatic S7-300, visualization 18"-TFT

Pictures Leybold-Heraeus Z 550

home Z 590 Z 550 Z 550 Z 590 upgraded Z 590 upgraded

Z 590 upgraded A 550 VZK upgraded Z 400 upgraded Z 550 upgraded Target

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