home Z 590 Z 550 Z 550 Z 590 upgraded Z 590 upgraded
Z 590 upgraded A 550 VZK upgraded Z 400 upgraded Z 550 upgraded Target
Leybold-Heraeus Z 550 - retrofitted, upgrated
Z 550 ( Cathode-sputtering system used for production )
Features
Sputter-down system, 3 cathode positions PK 150 (152mm dia.)
New DC-power-supply
New RF-power-supply and Variomatch
Sputter mode DC, with or without RF-Bias.
RF-etching.
New pneumatic system, new valves, new vacuum measuring systems and gas-inlet system
PLC control - Simatic S7-300, visualization 18"-TFT
Pictures Leybold-Heraeus Z 550
home Z 590 Z 550 Z 550 Z 590 upgraded Z 590 upgraded
Z 590 upgraded A 550 VZK upgraded Z 400 upgraded Z 550 upgraded Target