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Leybold Z 590 - upgrated

Z 590 ( Cleanroom sputtering system - used for production )

In a first step, the semi-automatic load-lock was replaced by a fully automated magazine load-lock. In a second step, the Kuhnke PLC 653-W was replaced by a Simatic S7-300 PLC. Visualization and data management process via a PC with integrated 17"-TFT monitor. Relevant process data are recorded in an Excel file. Furthermore, the complete vacuum measurement was re-equipped with gauges from Pfeiffer.

Pictures Leybold Z 590

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