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Completed projekts

Example: Leybold Heraeus Z 550 - upgraded

Leybold Heraeus Z 550 ( Etching system for production )

Reprocessing of a sputtering machine. The machine was completely gutted. Rotary feedthroughs and valves have been serviced. Critical components have been replaced by new components.

Items

Former sputtering machine converted into a etching machine.

New RF-Generator with Variomatch for etching

New air unit, valve island, new valves, new water distribution, new vacuum measuring and gas inlet system.

PLC - Simatic S7-300, PC und 19" TFT-display

Pictures Leybold-Heraeus Z 550

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